Micro Etching的意思|示意

In view oi the problems existing in the silicon micro pressure sensors, this paper proposes the chemical etching techniques and the selective etching processes to control diaphragm thickness.

并针对硅微压传感元件研制中存在的问题，提出采用化学腐蚀技术，选择性腐蚀工艺控制膜厚。

Using IC-compatible silicon as substrate and MEMS processing technology, it is fabricated with silicon wet etching and SU8 micro reaction pool.

以与IC兼容的硅作为基底材料，利用MEMS加工工艺，采用硅腐蚀及SU8微反应池方法制成了新型微电极传感器。

The levels of water absorption, thermal shock, frost resistance, resistance of chemical etching, resistance to staining and luster are higher than any normal micro-powder tiles.

在吸水率，耐热，耐寒，抗腐蚀和防污性能方面的指标都比普通厂家微粉砖要高。

With the increase of etching depth, the generated particles are difficult to escape from micro-structures, causes so that the ablation rates decreases.

随着刻蚀深度的增加，光解生成物的脱出变得困难，从而导致刻蚀速率的降低。

The invention can improve the micro-loading effect while etching the grooves in the process manufacturing the stress metal oxide semiconductor device.

本发明可改善应变金属氧化物半导体器件的制造中刻蚀沟槽时的微负载效应。

The evolution rule of the rare earth aluminum capacitor foil preparation process was investigated by means of bit etching, EBSD micro orientation analysis and X-ray method.

采用蚀坑法、EBSD微取向分析和X射线法等手段，对稀土电解电容器用铝箔制备过程中的织构演变规律进行了研究。