electron beam writing的意思|示意

DOE's fabrication techniques mainly include laser beam or electron beam writing, RIE, ion milling and thin film deposition.

衍射光学元件的制作技术主要包括激光或电子束直写、反应离子刻蚀、离子束铣及薄膜沉积。

The principles and features of raster scan, the function of the pattern generator and the process of the electron beam writing on the substrate under the control system are also introduced.

介绍了图形发生器的作用及电子束在控制系统作用下在基片上描绘图形的过程。

The mold manufacturing is the key part in imprint lithography process, which includes electron beam direct writing, stepping molding, and the conversion from small mold to big mold.

采用电子束直写、步进制模、压印翻制的压印模具生产工艺，其模具的制造是目前面临的难点。