metal film interconnection的意思|示意

Metallization is the process of depositing a thin film of metal and patterning it to form the desired interconnection arrangement.

金属化是淀积一层薄薄的金属膜的工艺，将其制成模版用于形成所需的内部互连排列。

Electromigration in metal thin film interconnection is one of the important problems for VLSI reliability.

金属薄膜互连的电迁移现象是VLSI最重要的可靠性问题之一。

This paper mainly studies the reliability of substrates of MCM-C including thick-film resistors, metal lines and vias for interconnection.

本研究重点研究了MCM—C基板的可靠性，包括厚膜电阻，基板布线以及互连通孔。