ultraviolet optics的意思|示意

A new design of off-axis five mirrors optics was presented which was used to extreme-ultraviolet lithography. It was very suit for the commercialization at optical quality and free work distance.

本文探讨了一种可应用于极紫外光刻光学系统的离轴五反射镜系统，它在光学质量、自由工作距离方面满足了极紫外光刻商业化的要求。

Multilayer optics in the extreme ultraviolet and soft X-ray range is reviewed in the paper. The advantages and difficulties are pointed out.

综述了极紫外和软x射线多层膜光学及其应用，指出了极紫外和软x射线光学的优点和难点。